New Product: = Automated mechanical monitoring system from InnerSense prevents wafer = handling issues

New Product: Automated mechanical monitoring system from InnerSense = prevents=20 wafer handling issues

22 October 2009 | By Mark Osborne | Product Briefings = > Wa= fer=20 Processing

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3D"" Product Briefing = Outline:=20 InnerSense LTD (a Ricor company) now offers a new wafer handling = analysis=20 product the SMW2 for automated mechanical monitoring of the 300mm = semiconductor=20 process tools. The new product offering is based on over 6 years of = experience=20 in preventing excursions related to wafers=E2=80=99 micro-cracks and = other mechanical=20 defects, as well as providing capabilities to detect worn-out process = tool=20 mechanical components and to plan more effective periodic maintenance. =

Problem: Wafer handling issues are responsible for = about 30%=20 of the overall yield loss in the fab. Collision, skidding, rubbing and = abrupt=20 lifting and chucking cause wafer micro cracks, breakage, and = backside/edge=20 defects. Any mechanical contact with the wafer is suspected to generate=20 particles. The more aggressive such contact is, the higher the particle = size and=20 count are likely to be. In addition, troubleshooting and reactive = maintenance of=20 those handling issues impacts tool availability and disrupts production. = Periodic monitoring of the entire wafer handling system by means of an=20 instrumented wafer (Smart Wafer) has been shown to pinpoint the root = cause of=20 such issues and confirm the effectiveness of a corrective action taken. = This=20 method has been adopted and implemented by leading IC manufacturers and=20 equipment suppliers. However, in the existing method the smart wafer is = manually=20 loaded from the docking station into a FOUP. This operation requires a = special=20 tool for opening the FOUP. It has to be done in a specific area in the = clean=20 room, and the wafer needs to be cleaned before the run. In addition the = raw data=20 recorded in the old method required expert analysis to return a = meaningful=20 diagnosis. This has limited its usage in high-volume manufacturing=20 environment.

Solution: The new product provides=20 customers with the capability of monitoring the process tools mechanical = health,=20 using the new =E2=80=9CSmart FOUP=E2=80=9D which interfaces with the = process tools like any=20 standard FOUP. New GUI software includes additional user friendly = analysis=20 capabilities, such as automatic SPC tool monitoring, tool-to-tool = performance=20 comparisons, and more. The new product employs simplified routines that = can be=20 easily implemented in a high volume manufacturing environment with = minimal=20 interference with the normal production=20 flow.

Applications: Troubleshooting, monitoring = and=20 predicting mechanical failures in any robotic wafer handling system. = Could be=20 also used by OEM's to select moving components and improve mechanical=20 design.

Platform: The new Smart Wafer- SMW2- = incorporates contact less communication and charging to allow regular = robotic=20 handling in and out of the =E2=80=9CSmart FOUP=E2=80=9D.. In the new = product. the docking=20 station is integrated into a dedicated FOUP. The data is downloaded via = optical=20 communication and the battery is recharged via induction, so that no = mechanical=20 contact is made with the wafer. Hence, the smart wafer can be handled = like any=20 other production or test wafer. Gathering periodic readings of every = tool on the=20 floor supports historical tracking and comparison of similar tools, = enabling=20 closer tool matching for tighter process and equipment control. It also = allows=20 harnessing the power of AEC (Automated Equipment Control) for managing = the=20 entire line through the central factory data system. Predictive=20 maintenance can be more effective by addressing only the trending up or = "out of=20 control" mechanical parts Collaboration between the tool manufacturer = and the=20 user in sharing typical vibration signatures and indicative signals may=20 facilitate reliable diagnosis and remote assistance. In the long run = such=20 collaboration will inevitably contribute to improving handling system = designs=20 and enhancing yields.

Availability: November = 2009=20 onwards.

3D""=20

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