On-Line SmartWafer

As a complement to the standard SmartWafer, the On-Line SmartWafer is now available for on-line robot teaching, tool leveling measurements & adjustments, and other mechanical troubleshooting tasks.

With an external physical envelope similar to the SmartWafer, the On-Line SmartWafer is a low-profile, low-weight silicon wafer that can be handled as any regular test wafer.

On-Line Vibration Monitoring:

The InnerSense On-Line SmartWafer runs through the equipment and measures all vibrations, accelerations and motions along its route. The data is transmitted in real-time, using Bluetooth technology, to an external laptop close to the tool. The on-line examination of the data permits hands-off robot teaching and other mechanical adjustments.
The On-Line SmartWafer can be recharged in a Smart FOUP with the same contactless technology as the standard SmartWafer.

On-Line leveling measurements & adjustments:

The InnerSense On-Line SmartWafer can be also used for on-line leveling measurements and adjustments for both

horizontal and vertical angles. The On-Line SmartWafer is loaded by the robotic equipment inside the tool on the location to be measured / adjusted, and transmits the leveling data to an external laptop using Bluetooth technology. The data is displayed in real-time on the laptop's screen with a user friendly GUI which will assist the operator in the fast adjustment of his tool.

Specifications:

·        Vibration sensitivity:        3 mg

·        Leveling accuracy:          0.1 ^o

·        Frequency response:      0Hz – 5 KHz

·        Operating temperature:  < 80^o C

·        Operating pressure:        10^-9 - 760 Torr

·        Weight 300mm wafer:    140 gr

·        Weight 200mm wafer:    70 gr

·        Thickness (total, central area):  3.2 mm