On-line level Adjustment

Leveling of equipment parts (chucks, loadports, robot blades, wafer stages)   is a complicated task in terms of physical access, suitable testing equipment and time consumption. While SmartWafer travels inside manufacturing equipment its sensors measure the leveling parameters of the wafer for each wafer position inside the equipment.

As a complement to the standard SmartWafer, the On-Line SmartWafer is now available for on-line robot teaching, tool leveling measurements & adjustments, and other mechanical troubleshooting tasks.

With an external physical appearance similar to the SmartWafer, the On-Line SmartWafer is a low-profile, low-weight silicon wafer that can be handled as any regular test wafer.

On-Line leveling measurements & adjustments:

The InnerSense On-Line SmartWafer can be also used for on-line leveling measurements and adjustments for both horizontal and vertical angles. The On-Line SmartWafer is loaded by the robotic equipment inside the tool on the location to be measured / adjusted, and transmits the leveling data to an external laptop using Bluetooth technology. The data is displayed in real-time on the laptop's screen with a user friendly GUI which will assist the operator in the fast adjustment of his tool.The measurement resolution is 0.1 ^o